南宫国际

This line was specially developed for the inspection of wafers or bonded wafers (MEMS) to detect cavities, inclusions, or delamination in bonded layers.

Loadport can be docked with standard Cassette

Aligner wafer calibration, edge detection

Dedicated wafer Robot for sampling, barcode reading, and sample placing in the sink

Four probes collaborate for rapid wafer ultrasound detection